Skip to Main content Skip to Navigation
Conference papers

Design and Fabrication of a Ring-Coupled Mach

Abstract : In this paper, we present a CMOScompatible integrated photonics resonant gyroscope incorporating active Si&Ge components with low-loss SiN waveguiding structures for the first time. The gyroscope design is based on a ring-coupled Mach-Zehnder interferometer (19.2 mm ring length). Based on numerical modelling, the estimated resolution is 1.08 deg/s, representing a 1.56-times improvement over a single ring all-pass design with the same footprint. Further improvement afforded by the MZI-based design is expected under Kerr effet limited conditions. Devices were fabricated with the STMicroelectronics DAPHNE (Datacom Advanced Photonics Nanoscale Environment) 300 mm Photonic R&D platform. Experimental measurements under static (nonrotating) conditions confirm the numerical modelling results.
Complete list of metadata
Contributor : Regis Orobtchouk Connect in order to contact the contributor
Submitted on : Thursday, January 6, 2022 - 5:36:32 PM
Last modification on : Friday, January 21, 2022 - 3:51:30 AM
Long-term archiving on: : Thursday, April 7, 2022 - 7:54:35 PM


2021 EDesign and Fabrication o...
Files produced by the author(s)




Eva Kempf, Pierre Labeye, Philippe Grosse, Frederic Boeuf, Stephane Monfray, et al.. Design and Fabrication of a Ring-Coupled Mach. ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC), Sep 2021, Grenoble, France. pp.179-182, ⟨10.1109/ESSCIRC53450.2021.9567877⟩. ⟨halshs-03515494⟩



Record views


Files downloads